AI ×Robotics business
Technologies / AI Coating system
It is a digital manufacturing technology that enables robots to perform film formation and physical property evaluation, and to optimize film formation conditions and composition through predictive analysis by AI (Bayes’ analysis) to minimize the optimal conditions.
AICO (AI Coating System)
Gas phase technology×Optimizing device characteristics in the shortest possible time using AI.
|Vessel size||φ 0.5 × H 0.2 m|
|Attainable vacuum||5.0 × 10-6 Pa|
|Available film types||BaTiO3、LiPON、Al2O3|
|Applicable wafer||8～12 inch|
|Film thickness||1～30 nm|
|Film forming speed||0.1 nm/cycle|