It is a digital manufacturing technology that enables robots to perform film formation and physical property evaluation, and to optimize film formation conditions and composition through predictive analysis by AI (Bayes’ analysis) to minimize the optimal conditions.
Vessel size | φ 0.5 × H 0.2 m |
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Attainable vacuum | 5.0 × 10-6 Pa |
Available film types | BaTiO3、LiPON、Al2O3 |
Applicable wafer | 8~12 inch |
Film thickness | 1~30 nm |
Film forming speed | 0.1 nm/cycle |
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